A student completing this course should be able to…

1. Describe the field of microsystems and its largest contributions to military and civilian life.

2. Describe standard microfabrication techniques.

3. Describe common actuation and sensing methods in microsystems.

4. Calculate expected electrical and mechanical parameters for microfabricated sensors and actuators given geometry and material property information.

5. Analyze a given microsystem to explain its operation mechanism and how it is manufactured.

6. Determine a process sequence using standard microfabrication techniques that will result in a desired device design.

7. Design, layout and simulate a device using MEMSPro CAD software.

8. Apply microfabrication techniques in the laboratory

9. Test and evaluate a microsystem design and make suggestions for improvement

10. Communicate his or her work using appropriate technical writing format and including proper citations to previous work.