LECTURE

LAB

ASSIGNMENTS

1

25-Aug

27-Aug

Course Introduction

(pp. 1-43)

Lab 1A-C:   Material Deposition

2

1-Sep

3-Sep

Materials: Electrical  and Mechanical Properties

(pp. 48-72)

Lab 1D:  Photolithography

Problem Set 1 due 1 Sep

3

10-Sep

(no class Tues)

Mechanics of Materials: Beam Bending & Spring Constants

(pp. 73-83)

Lab 1E: Etching

Problem Set 2 due 10 Sep

4

15-Sep

17-Sep

Resonance and Pull-In

(pp. 83-116)

Electrostatic sensing and actuation

(pp. 116- 145)

Lab 2: MEMSPro Introduction

Problem Set 3 due 15 Sep

Lab 1 handout due 17 Sep

5

22-Sep

24-Sep

Review (Tuesday)

Exam I: Thurs, 24 September

Lab 2 wrap-up

Problem Set 4 due 22 Sep

6

29-Sep

1-Oct

Thermal Sensing and Actuation

(pp. 153 -200)

Bulk Micromachining Intro

Lab 3: Bulk Micromachining

Lab 2 handout due 29 Sep

7

6-Oct

8-Oct

Piezoresistive Sensors

(pp. 207-240)

Lab 3, cont.

Problem Set 5 due 6 Oct

8

13-Oct

15-Oct

Piezoelectric Sensing and Actuation

(pp. 245-273)

Lab3, cont.

(pre-lab)

Problem Set 6 due 13 Oct

9

20-Oct

22-Oct

Magnetic Actuation

Comparison of methods

(pp. 279-321)

Surface Micromachining Intro

Lab 4: Use of Standard Processes

Problem Set 7 due 20 Oct

Lab 3 Report due 22 Oct

10

27-Oct

29-Oct

Lab 4, cont.

Lab 4, cont.

Problem Set 8 due 27 Oct

Williams et al., JMEMS 2003

11

3-Nov

5-Nov

Review

Lab 4 wrap-up

Exam II

Thursday 5 Nov

Lab 4 report due 5 Nov

12

10-Nov

12-Nov

Polymer MEMS

(pp. 397-419)

Microfluidics

(pp. 422-448)

Lab 5: Surface Micromachining

No homework

13

17-Nov

19-Nov

Optical MEMS

(pp. 486-502)

RF MEMS

(Switch Review, Tunable RFMEMS Review)

Lab 5, cont.

Problem Set 9 due 17 Nov

14

24- Nov

No lecture

(Thanksgiving Week)

Lab 5, cont.

Problem Set 10 due 24 Nov

15

1-Dec

3-Dec

Final project intro

Lab 5 completion

Lab 5 report due 8 Dec

16

8-Dec

10-Dec

Final project

Final project

BEAT ARMY!